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Wafer Bonding
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Wafer Bonding
Tool
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spiedigitallibrary.org
Exploration and mitigation of local wafer deformations resulting from direct wafer-to-wafer bonding
Essentially the whole semiconductor industry is exploring wafer-to-wafer bonding as a next step for improving the IC performance levels. While wafer-to-wafer bonding has been used for quite some time in the fabrication process of CMOS-Image sensors and the creation of advanced substrates like Silicon-on-Insulator (SOI), it currently also finds ...
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